7/2/2010	12:04:47 AM	Recipe started at 12:04 AM
7/2/2010	12:04:47 AM	Helium valve closed
7/2/2010	12:04:47 AM	H2 valve closed
7/2/2010	12:04:47 AM	BCl3 valve closed
7/2/2010	12:04:47 AM	PH3 valve closed
7/2/2010	12:04:47 AM	SiCl4 pre valve closed
7/2/2010	12:04:47 AM	SiCl4 post valve closed
7/2/2010	12:04:47 AM	Main Vac valve closed
7/2/2010	12:04:47 AM	Bubbler valve closed
7/2/2010	12:04:47 AM	Bypass valve opened
7/2/2010	12:04:47 AM	Helium MFC set to  0.000000
7/2/2010	12:04:47 AM	H2 MFC set to  0.000000
7/2/2010	12:04:47 AM	BCl3 MFC set to  0.000000
7/2/2010	12:04:47 AM	PHl3 MFC set to  0.000000
7/2/2010	12:04:47 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:04:47 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:04:47 AM	Tube furnace set to 0
7/2/2010	12:05:36 AM	Helium valve closed
7/2/2010	12:05:36 AM	H2 valve closed
7/2/2010	12:05:36 AM	BCl3 valve closed
7/2/2010	12:05:36 AM	PH3 valve closed
7/2/2010	12:05:36 AM	SiCl4 pre valve closed
7/2/2010	12:05:36 AM	SiCl4 post valve closed
7/2/2010	12:05:36 AM	Bubbler valve closed
7/2/2010	12:05:36 AM	Main Vac valve opened
7/2/2010	12:05:36 AM	Bypass valve opened
7/2/2010	12:05:36 AM	Helium MFC set to  0.000000
7/2/2010	12:05:36 AM	H2 MFC set to  0.000000
7/2/2010	12:05:36 AM	BCl3 MFC set to  0.000000
7/2/2010	12:05:36 AM	PHl3 MFC set to  0.000000
7/2/2010	12:05:36 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:05:36 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:05:36 AM	Tube furnace set to 0
7/2/2010	12:06:36 AM	H2 valve closed
7/2/2010	12:06:36 AM	BCl3 valve closed
7/2/2010	12:06:36 AM	PH3 valve closed
7/2/2010	12:06:36 AM	SiCl4 pre valve closed
7/2/2010	12:06:36 AM	SiCl4 post valve closed
7/2/2010	12:06:36 AM	Bubbler valve closed
7/2/2010	12:06:36 AM	Helium valve opened
7/2/2010	12:06:36 AM	Main Vac valve opened
7/2/2010	12:06:36 AM	Bypass valve opened
7/2/2010	12:06:36 AM	Helium MFC set to  100.000000
7/2/2010	12:06:36 AM	H2 MFC set to  0.000000
7/2/2010	12:06:36 AM	BCl3 MFC set to  0.000000
7/2/2010	12:06:36 AM	PHl3 MFC set to  0.000000
7/2/2010	12:06:36 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:06:36 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:06:36 AM	Tube furnace set to 0
7/2/2010	12:15:36 AM	Helium valve closed
7/2/2010	12:15:36 AM	H2 valve closed
7/2/2010	12:15:36 AM	BCl3 valve closed
7/2/2010	12:15:36 AM	PH3 valve closed
7/2/2010	12:15:36 AM	SiCl4 pre valve closed
7/2/2010	12:15:36 AM	SiCl4 post valve closed
7/2/2010	12:15:36 AM	Bubbler valve closed
7/2/2010	12:15:36 AM	Main Vac valve opened
7/2/2010	12:15:36 AM	Bypass valve opened
7/2/2010	12:15:36 AM	Helium MFC set to  0.000000
7/2/2010	12:15:36 AM	H2 MFC set to  0.000000
7/2/2010	12:15:36 AM	BCl3 MFC set to  0.000000
7/2/2010	12:15:36 AM	PHl3 MFC set to  0.000000
7/2/2010	12:15:36 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:15:36 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:15:36 AM	Tube furnace set to 0
7/2/2010	12:16:36 AM	H2 valve closed
7/2/2010	12:16:36 AM	BCl3 valve closed
7/2/2010	12:16:36 AM	PH3 valve closed
7/2/2010	12:16:36 AM	SiCl4 pre valve closed
7/2/2010	12:16:36 AM	SiCl4 post valve closed
7/2/2010	12:16:36 AM	Bubbler valve closed
7/2/2010	12:16:36 AM	Helium valve opened
7/2/2010	12:16:36 AM	Main Vac valve opened
7/2/2010	12:16:36 AM	Bypass valve opened
7/2/2010	12:16:36 AM	Helium MFC set to  100.000000
7/2/2010	12:16:36 AM	H2 MFC set to  0.000000
7/2/2010	12:16:36 AM	BCl3 MFC set to  0.000000
7/2/2010	12:16:36 AM	PHl3 MFC set to  0.000000
7/2/2010	12:16:36 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:16:36 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:16:36 AM	Tube furnace set to 0
7/2/2010	12:24:47 AM	Helium valve closed
7/2/2010	12:24:47 AM	H2 valve closed
7/2/2010	12:24:47 AM	BCl3 valve closed
7/2/2010	12:24:47 AM	PH3 valve closed
7/2/2010	12:24:47 AM	SiCl4 pre valve closed
7/2/2010	12:24:47 AM	SiCl4 post valve closed
7/2/2010	12:24:47 AM	Bubbler valve closed
7/2/2010	12:24:47 AM	Main Vac valve opened
7/2/2010	12:24:47 AM	Bypass valve opened
7/2/2010	12:24:47 AM	Helium MFC set to  0.000000
7/2/2010	12:24:47 AM	H2 MFC set to  0.000000
7/2/2010	12:24:47 AM	BCl3 MFC set to  0.000000
7/2/2010	12:24:47 AM	PHl3 MFC set to  0.000000
7/2/2010	12:24:47 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:24:47 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:24:47 AM	Tube furnace set to 0
7/2/2010	12:25:47 AM	H2 valve closed
7/2/2010	12:25:47 AM	BCl3 valve closed
7/2/2010	12:25:47 AM	PH3 valve closed
7/2/2010	12:25:47 AM	SiCl4 pre valve closed
7/2/2010	12:25:47 AM	SiCl4 post valve closed
7/2/2010	12:25:47 AM	Bubbler valve closed
7/2/2010	12:25:47 AM	Helium valve opened
7/2/2010	12:25:47 AM	Main Vac valve opened
7/2/2010	12:25:47 AM	Bypass valve opened
7/2/2010	12:25:47 AM	Helium MFC set to  100.000000
7/2/2010	12:25:47 AM	H2 MFC set to  0.000000
7/2/2010	12:25:47 AM	BCl3 MFC set to  0.000000
7/2/2010	12:25:47 AM	PHl3 MFC set to  0.000000
7/2/2010	12:25:47 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:25:47 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:25:47 AM	Tube furnace set to 0
7/2/2010	12:34:47 AM	Helium valve closed
7/2/2010	12:34:47 AM	H2 valve closed
7/2/2010	12:34:47 AM	BCl3 valve closed
7/2/2010	12:34:47 AM	PH3 valve closed
7/2/2010	12:34:47 AM	SiCl4 pre valve closed
7/2/2010	12:34:47 AM	SiCl4 post valve closed
7/2/2010	12:34:47 AM	Bubbler valve closed
7/2/2010	12:34:47 AM	Main Vac valve opened
7/2/2010	12:34:47 AM	Bypass valve opened
7/2/2010	12:34:47 AM	Helium MFC set to  0.000000
7/2/2010	12:34:47 AM	H2 MFC set to  0.000000
7/2/2010	12:34:47 AM	BCl3 MFC set to  0.000000
7/2/2010	12:34:47 AM	PHl3 MFC set to  0.000000
7/2/2010	12:34:47 AM	SiCl4 MFC set to  0.000000
7/2/2010	12:34:47 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:34:47 AM	Tube furnace set to 0
7/2/2010	12:34:48 AM	Run finished at 12:34 AM
7/2/2010	9:34:17 AM	Recipe started at 9:34 AM
7/2/2010	9:34:17 AM	Helium valve closed
7/2/2010	9:34:17 AM	BCl3 valve closed
7/2/2010	9:34:17 AM	PH3 valve closed
7/2/2010	9:34:17 AM	SiCl4 pre valve closed
7/2/2010	9:34:17 AM	SiCl4 post valve closed
7/2/2010	9:34:17 AM	Main Vac valve closed
7/2/2010	9:34:17 AM	Bypass valve closed
7/2/2010	9:34:17 AM	Bubbler valve closed
7/2/2010	9:34:17 AM	H2 valve opened
7/2/2010	9:34:17 AM	Helium MFC set to  0.000000
7/2/2010	9:34:17 AM	H2 MFC set to  500.000000
7/2/2010	9:34:17 AM	BCl3 MFC set to  0.000000
7/2/2010	9:34:17 AM	PHl3 MFC set to  0.000000
7/2/2010	9:34:17 AM	SiCl4 MFC set to  0.000000
7/2/2010	9:34:17 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:34:17 AM	Tube furnace set to 1000
7/2/2010	9:35:39 AM	Helium valve closed
7/2/2010	9:35:39 AM	BCl3 valve closed
7/2/2010	9:35:39 AM	PH3 valve closed
7/2/2010	9:35:39 AM	SiCl4 pre valve closed
7/2/2010	9:35:39 AM	SiCl4 post valve closed
7/2/2010	9:35:39 AM	Main Vac valve closed
7/2/2010	9:35:39 AM	Bypass valve closed
7/2/2010	9:35:39 AM	H2 valve opened
7/2/2010	9:35:39 AM	Bubbler valve opened
7/2/2010	9:35:39 AM	Helium MFC set to  0.000000
7/2/2010	9:35:39 AM	H2 MFC set to  500.000000
7/2/2010	9:35:39 AM	BCl3 MFC set to  0.000000
7/2/2010	9:35:39 AM	PHl3 MFC set to  0.000000
7/2/2010	9:35:39 AM	SiCl4 MFC set to  0.000000
7/2/2010	9:35:39 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:35:40 AM	Tube furnace set to 1000
7/2/2010	9:55:40 AM	Helium valve closed
7/2/2010	9:55:40 AM	PH3 valve closed
7/2/2010	9:55:40 AM	Main Vac valve closed
7/2/2010	9:55:40 AM	Bypass valve closed
7/2/2010	9:55:40 AM	H2 valve opened
7/2/2010	9:55:40 AM	BCl3 valve opened
7/2/2010	9:55:40 AM	SiCl4 pre valve opened
7/2/2010	9:55:40 AM	SiCl4 post valve opened
7/2/2010	9:55:40 AM	Bubbler valve opened
7/2/2010	9:55:40 AM	Helium MFC set to  0.000000
7/2/2010	9:55:40 AM	H2 MFC set to  500.000000
7/2/2010	9:55:40 AM	BCl3 MFC set to  35.000000
7/2/2010	9:55:40 AM	PHl3 MFC set to  0.000000
7/2/2010	9:55:40 AM	SiCl4 MFC set to  50.000000
7/2/2010	9:55:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:55:40 AM	Tube furnace set to 1000
7/2/2010	10:15:40 AM	Helium valve closed
7/2/2010	10:15:40 AM	BCl3 valve closed
7/2/2010	10:15:40 AM	PH3 valve closed
7/2/2010	10:15:40 AM	SiCl4 pre valve closed
7/2/2010	10:15:40 AM	SiCl4 post valve closed
7/2/2010	10:15:40 AM	Main Vac valve closed
7/2/2010	10:15:40 AM	Bypass valve closed
7/2/2010	10:15:40 AM	H2 valve opened
7/2/2010	10:15:40 AM	Bubbler valve opened
7/2/2010	10:15:40 AM	Helium MFC set to  0.000000
7/2/2010	10:15:40 AM	H2 MFC set to  500.000000
7/2/2010	10:15:40 AM	BCl3 MFC set to  0.000000
7/2/2010	10:15:40 AM	PHl3 MFC set to  0.000000
7/2/2010	10:15:40 AM	SiCl4 MFC set to  0.000000
7/2/2010	10:15:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:15:40 AM	Tube furnace set to 750
7/2/2010	10:35:40 AM	H2 valve closed
7/2/2010	10:35:40 AM	BCl3 valve closed
7/2/2010	10:35:40 AM	PH3 valve closed
7/2/2010	10:35:40 AM	SiCl4 pre valve closed
7/2/2010	10:35:40 AM	SiCl4 post valve closed
7/2/2010	10:35:40 AM	Main Vac valve closed
7/2/2010	10:35:40 AM	Bypass valve closed
7/2/2010	10:35:40 AM	Helium valve opened
7/2/2010	10:35:40 AM	Bubbler valve opened
7/2/2010	10:35:40 AM	Helium MFC set to  500.000000
7/2/2010	10:35:40 AM	H2 MFC set to  0.000000
7/2/2010	10:35:40 AM	BCl3 MFC set to  0.000000
7/2/2010	10:35:40 AM	PHl3 MFC set to  0.000000
7/2/2010	10:35:40 AM	SiCl4 MFC set to  0.000000
7/2/2010	10:35:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:35:40 AM	Tube furnace set to 0
7/2/2010	10:55:40 AM	Helium valve closed
7/2/2010	10:55:40 AM	H2 valve closed
7/2/2010	10:55:40 AM	BCl3 valve closed
7/2/2010	10:55:40 AM	PH3 valve closed
7/2/2010	10:55:40 AM	SiCl4 pre valve closed
7/2/2010	10:55:40 AM	SiCl4 post valve closed
7/2/2010	10:55:40 AM	Main Vac valve closed
7/2/2010	10:55:40 AM	Bypass valve closed
7/2/2010	10:55:40 AM	Bubbler valve closed
7/2/2010	10:55:40 AM	Helium MFC set to  0.000000
7/2/2010	10:55:40 AM	H2 MFC set to  0.000000
7/2/2010	10:55:40 AM	BCl3 MFC set to  0.000000
7/2/2010	10:55:40 AM	PHl3 MFC set to  0.000000
7/2/2010	10:55:40 AM	SiCl4 MFC set to  0.000000
7/2/2010	10:55:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:55:40 AM	Tube furnace set to 0
7/2/2010	10:55:40 AM	Run finished at 10:55 AM
7/2/2010	11:05:29 AM	Recipe started at 11:05 AM
7/2/2010	11:05:29 AM	Helium valve closed
7/2/2010	11:05:29 AM	H2 valve closed
7/2/2010	11:05:29 AM	BCl3 valve closed
7/2/2010	11:05:29 AM	PH3 valve closed
7/2/2010	11:05:29 AM	SiCl4 pre valve closed
7/2/2010	11:05:29 AM	SiCl4 post valve closed
7/2/2010	11:05:29 AM	Main Vac valve closed
7/2/2010	11:05:29 AM	Bubbler valve closed
7/2/2010	11:05:29 AM	Bypass valve opened
7/2/2010	11:05:29 AM	Helium MFC set to  0.000000
7/2/2010	11:05:29 AM	H2 MFC set to  0.000000
7/2/2010	11:05:29 AM	BCl3 MFC set to  0.000000
7/2/2010	11:05:29 AM	PHl3 MFC set to  0.000000
7/2/2010	11:05:29 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:05:29 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:05:29 AM	Tube furnace set to 0
7/2/2010	11:06:18 AM	Helium valve closed
7/2/2010	11:06:18 AM	H2 valve closed
7/2/2010	11:06:18 AM	BCl3 valve closed
7/2/2010	11:06:18 AM	PH3 valve closed
7/2/2010	11:06:18 AM	SiCl4 pre valve closed
7/2/2010	11:06:18 AM	SiCl4 post valve closed
7/2/2010	11:06:18 AM	Bubbler valve closed
7/2/2010	11:06:18 AM	Main Vac valve opened
7/2/2010	11:06:18 AM	Bypass valve opened
7/2/2010	11:06:18 AM	Helium MFC set to  0.000000
7/2/2010	11:06:18 AM	H2 MFC set to  0.000000
7/2/2010	11:06:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:06:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:06:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:06:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:06:18 AM	Tube furnace set to 0
7/2/2010	11:07:18 AM	H2 valve closed
7/2/2010	11:07:18 AM	BCl3 valve closed
7/2/2010	11:07:18 AM	PH3 valve closed
7/2/2010	11:07:18 AM	SiCl4 pre valve closed
7/2/2010	11:07:18 AM	SiCl4 post valve closed
7/2/2010	11:07:18 AM	Bubbler valve closed
7/2/2010	11:07:18 AM	Helium valve opened
7/2/2010	11:07:18 AM	Main Vac valve opened
7/2/2010	11:07:18 AM	Bypass valve opened
7/2/2010	11:07:18 AM	Helium MFC set to  100.000000
7/2/2010	11:07:18 AM	H2 MFC set to  0.000000
7/2/2010	11:07:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:07:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:07:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:07:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:07:18 AM	Tube furnace set to 0
7/2/2010	11:16:18 AM	Helium valve closed
7/2/2010	11:16:18 AM	H2 valve closed
7/2/2010	11:16:18 AM	BCl3 valve closed
7/2/2010	11:16:18 AM	PH3 valve closed
7/2/2010	11:16:18 AM	SiCl4 pre valve closed
7/2/2010	11:16:18 AM	SiCl4 post valve closed
7/2/2010	11:16:18 AM	Bubbler valve closed
7/2/2010	11:16:18 AM	Main Vac valve opened
7/2/2010	11:16:18 AM	Bypass valve opened
7/2/2010	11:16:18 AM	Helium MFC set to  0.000000
7/2/2010	11:16:18 AM	H2 MFC set to  0.000000
7/2/2010	11:16:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:16:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:16:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:16:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:16:18 AM	Tube furnace set to 0
7/2/2010	11:17:18 AM	H2 valve closed
7/2/2010	11:17:18 AM	BCl3 valve closed
7/2/2010	11:17:18 AM	PH3 valve closed
7/2/2010	11:17:18 AM	SiCl4 pre valve closed
7/2/2010	11:17:18 AM	SiCl4 post valve closed
7/2/2010	11:17:18 AM	Bubbler valve closed
7/2/2010	11:17:18 AM	Helium valve opened
7/2/2010	11:17:18 AM	Main Vac valve opened
7/2/2010	11:17:18 AM	Bypass valve opened
7/2/2010	11:17:18 AM	Helium MFC set to  100.000000
7/2/2010	11:17:18 AM	H2 MFC set to  0.000000
7/2/2010	11:17:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:17:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:17:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:17:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:17:18 AM	Tube furnace set to 0
7/2/2010	11:26:18 AM	Helium valve closed
7/2/2010	11:26:18 AM	H2 valve closed
7/2/2010	11:26:18 AM	BCl3 valve closed
7/2/2010	11:26:18 AM	PH3 valve closed
7/2/2010	11:26:18 AM	SiCl4 pre valve closed
7/2/2010	11:26:18 AM	SiCl4 post valve closed
7/2/2010	11:26:18 AM	Bubbler valve closed
7/2/2010	11:26:18 AM	Main Vac valve opened
7/2/2010	11:26:18 AM	Bypass valve opened
7/2/2010	11:26:18 AM	Helium MFC set to  0.000000
7/2/2010	11:26:18 AM	H2 MFC set to  0.000000
7/2/2010	11:26:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:26:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:26:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:26:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:26:18 AM	Tube furnace set to 0
7/2/2010	11:27:18 AM	H2 valve closed
7/2/2010	11:27:18 AM	BCl3 valve closed
7/2/2010	11:27:18 AM	PH3 valve closed
7/2/2010	11:27:18 AM	SiCl4 pre valve closed
7/2/2010	11:27:18 AM	SiCl4 post valve closed
7/2/2010	11:27:18 AM	Bubbler valve closed
7/2/2010	11:27:18 AM	Helium valve opened
7/2/2010	11:27:18 AM	Main Vac valve opened
7/2/2010	11:27:18 AM	Bypass valve opened
7/2/2010	11:27:18 AM	Helium MFC set to  100.000000
7/2/2010	11:27:18 AM	H2 MFC set to  0.000000
7/2/2010	11:27:18 AM	BCl3 MFC set to  0.000000
7/2/2010	11:27:18 AM	PHl3 MFC set to  0.000000
7/2/2010	11:27:18 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:27:18 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:27:19 AM	Tube furnace set to 0
7/2/2010	11:36:19 AM	Helium valve closed
7/2/2010	11:36:19 AM	H2 valve closed
7/2/2010	11:36:19 AM	BCl3 valve closed
7/2/2010	11:36:19 AM	PH3 valve closed
7/2/2010	11:36:19 AM	SiCl4 pre valve closed
7/2/2010	11:36:19 AM	SiCl4 post valve closed
7/2/2010	11:36:19 AM	Bubbler valve closed
7/2/2010	11:36:19 AM	Main Vac valve opened
7/2/2010	11:36:19 AM	Bypass valve opened
7/2/2010	11:36:19 AM	Helium MFC set to  0.000000
7/2/2010	11:36:19 AM	H2 MFC set to  0.000000
7/2/2010	11:36:19 AM	BCl3 MFC set to  0.000000
7/2/2010	11:36:19 AM	PHl3 MFC set to  0.000000
7/2/2010	11:36:19 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:36:19 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:36:19 AM	Tube furnace set to 0
7/2/2010	11:36:20 AM	Run finished at 11:36 AM
7/2/2010	11:54:49 AM	Recipe started at 11:54 AM
7/2/2010	11:54:49 AM	Helium valve closed
7/2/2010	11:54:49 AM	H2 valve closed
7/2/2010	11:54:49 AM	BCl3 valve closed
7/2/2010	11:54:49 AM	PH3 valve closed
7/2/2010	11:54:49 AM	SiCl4 pre valve closed
7/2/2010	11:54:49 AM	SiCl4 post valve closed
7/2/2010	11:54:49 AM	Main Vac valve closed
7/2/2010	11:54:49 AM	Bubbler valve closed
7/2/2010	11:54:49 AM	Bypass valve opened
7/2/2010	11:54:49 AM	Helium MFC set to  0.000000
7/2/2010	11:54:49 AM	H2 MFC set to  0.000000
7/2/2010	11:54:49 AM	BCl3 MFC set to  0.000000
7/2/2010	11:54:49 AM	PHl3 MFC set to  0.000000
7/2/2010	11:54:49 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:54:49 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:54:49 AM	Tube furnace set to 0
7/2/2010	11:54:49 AM	Helium valve closed
7/2/2010	11:54:49 AM	H2 valve closed
7/2/2010	11:54:49 AM	BCl3 valve closed
7/2/2010	11:54:49 AM	PH3 valve closed
7/2/2010	11:54:49 AM	SiCl4 pre valve closed
7/2/2010	11:54:49 AM	SiCl4 post valve closed
7/2/2010	11:54:49 AM	Bubbler valve closed
7/2/2010	11:54:49 AM	Main Vac valve opened
7/2/2010	11:54:49 AM	Bypass valve opened
7/2/2010	11:54:49 AM	Helium MFC set to  0.000000
7/2/2010	11:54:49 AM	H2 MFC set to  0.000000
7/2/2010	11:54:49 AM	BCl3 MFC set to  0.000000
7/2/2010	11:54:49 AM	PHl3 MFC set to  0.000000
7/2/2010	11:54:49 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:54:49 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:54:49 AM	Tube furnace set to 0
7/2/2010	11:55:49 AM	H2 valve closed
7/2/2010	11:55:49 AM	BCl3 valve closed
7/2/2010	11:55:49 AM	PH3 valve closed
7/2/2010	11:55:49 AM	SiCl4 pre valve closed
7/2/2010	11:55:49 AM	SiCl4 post valve closed
7/2/2010	11:55:49 AM	Bubbler valve closed
7/2/2010	11:55:49 AM	Helium valve opened
7/2/2010	11:55:49 AM	Main Vac valve opened
7/2/2010	11:55:49 AM	Bypass valve opened
7/2/2010	11:55:49 AM	Helium MFC set to  100.000000
7/2/2010	11:55:49 AM	H2 MFC set to  0.000000
7/2/2010	11:55:49 AM	BCl3 MFC set to  0.000000
7/2/2010	11:55:49 AM	PHl3 MFC set to  0.000000
7/2/2010	11:55:49 AM	SiCl4 MFC set to  0.000000
7/2/2010	11:55:49 AM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:55:50 AM	Tube furnace set to 0
7/2/2010	12:04:50 PM	Helium valve closed
7/2/2010	12:04:50 PM	H2 valve closed
7/2/2010	12:04:50 PM	BCl3 valve closed
7/2/2010	12:04:50 PM	PH3 valve closed
7/2/2010	12:04:50 PM	SiCl4 pre valve closed
7/2/2010	12:04:50 PM	SiCl4 post valve closed
7/2/2010	12:04:50 PM	Bubbler valve closed
7/2/2010	12:04:50 PM	Main Vac valve opened
7/2/2010	12:04:50 PM	Bypass valve opened
7/2/2010	12:04:50 PM	Helium MFC set to  0.000000
7/2/2010	12:04:50 PM	H2 MFC set to  0.000000
7/2/2010	12:04:50 PM	BCl3 MFC set to  0.000000
7/2/2010	12:04:50 PM	PHl3 MFC set to  0.000000
7/2/2010	12:04:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	12:04:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:04:50 PM	Tube furnace set to 0
7/2/2010	12:05:50 PM	H2 valve closed
7/2/2010	12:05:50 PM	BCl3 valve closed
7/2/2010	12:05:50 PM	PH3 valve closed
7/2/2010	12:05:50 PM	SiCl4 pre valve closed
7/2/2010	12:05:50 PM	SiCl4 post valve closed
7/2/2010	12:05:50 PM	Bubbler valve closed
7/2/2010	12:05:50 PM	Helium valve opened
7/2/2010	12:05:50 PM	Main Vac valve opened
7/2/2010	12:05:50 PM	Bypass valve opened
7/2/2010	12:05:50 PM	Helium MFC set to  100.000000
7/2/2010	12:05:50 PM	H2 MFC set to  0.000000
7/2/2010	12:05:50 PM	BCl3 MFC set to  0.000000
7/2/2010	12:05:50 PM	PHl3 MFC set to  0.000000
7/2/2010	12:05:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	12:05:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:05:50 PM	Tube furnace set to 0
7/2/2010	12:14:50 PM	Helium valve closed
7/2/2010	12:14:50 PM	H2 valve closed
7/2/2010	12:14:50 PM	BCl3 valve closed
7/2/2010	12:14:50 PM	PH3 valve closed
7/2/2010	12:14:50 PM	SiCl4 pre valve closed
7/2/2010	12:14:50 PM	SiCl4 post valve closed
7/2/2010	12:14:50 PM	Bubbler valve closed
7/2/2010	12:14:50 PM	Main Vac valve opened
7/2/2010	12:14:50 PM	Bypass valve opened
7/2/2010	12:14:50 PM	Helium MFC set to  0.000000
7/2/2010	12:14:50 PM	H2 MFC set to  0.000000
7/2/2010	12:14:50 PM	BCl3 MFC set to  0.000000
7/2/2010	12:14:50 PM	PHl3 MFC set to  0.000000
7/2/2010	12:14:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	12:14:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:14:50 PM	Tube furnace set to 0
7/2/2010	12:15:50 PM	H2 valve closed
7/2/2010	12:15:50 PM	BCl3 valve closed
7/2/2010	12:15:50 PM	PH3 valve closed
7/2/2010	12:15:50 PM	SiCl4 pre valve closed
7/2/2010	12:15:50 PM	SiCl4 post valve closed
7/2/2010	12:15:50 PM	Bubbler valve closed
7/2/2010	12:15:50 PM	Helium valve opened
7/2/2010	12:15:50 PM	Main Vac valve opened
7/2/2010	12:15:50 PM	Bypass valve opened
7/2/2010	12:15:50 PM	Helium MFC set to  100.000000
7/2/2010	12:15:50 PM	H2 MFC set to  0.000000
7/2/2010	12:15:50 PM	BCl3 MFC set to  0.000000
7/2/2010	12:15:50 PM	PHl3 MFC set to  0.000000
7/2/2010	12:15:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	12:15:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:15:50 PM	Tube furnace set to 0
7/2/2010	12:24:50 PM	Helium valve closed
7/2/2010	12:24:50 PM	H2 valve closed
7/2/2010	12:24:50 PM	BCl3 valve closed
7/2/2010	12:24:50 PM	PH3 valve closed
7/2/2010	12:24:50 PM	SiCl4 pre valve closed
7/2/2010	12:24:50 PM	SiCl4 post valve closed
7/2/2010	12:24:50 PM	Bubbler valve closed
7/2/2010	12:24:50 PM	Main Vac valve opened
7/2/2010	12:24:50 PM	Bypass valve opened
7/2/2010	12:24:50 PM	Helium MFC set to  0.000000
7/2/2010	12:24:50 PM	H2 MFC set to  0.000000
7/2/2010	12:24:50 PM	BCl3 MFC set to  0.000000
7/2/2010	12:24:50 PM	PHl3 MFC set to  0.000000
7/2/2010	12:24:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	12:24:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	12:24:50 PM	Tube furnace set to 0
7/2/2010	12:24:51 PM	Run finished at 12:24 PM
7/2/2010	1:35:57 PM	Recipe started at 1:35 PM
7/2/2010	1:35:57 PM	Helium valve closed
7/2/2010	1:35:57 PM	BCl3 valve closed
7/2/2010	1:35:57 PM	PH3 valve closed
7/2/2010	1:35:57 PM	SiCl4 pre valve closed
7/2/2010	1:35:57 PM	SiCl4 post valve closed
7/2/2010	1:35:57 PM	Main Vac valve closed
7/2/2010	1:35:57 PM	Bypass valve closed
7/2/2010	1:35:57 PM	Bubbler valve closed
7/2/2010	1:35:57 PM	H2 valve opened
7/2/2010	1:35:57 PM	Helium MFC set to  0.000000
7/2/2010	1:35:57 PM	H2 MFC set to  500.000000
7/2/2010	1:35:57 PM	BCl3 MFC set to  0.000000
7/2/2010	1:35:57 PM	PHl3 MFC set to  0.000000
7/2/2010	1:35:57 PM	SiCl4 MFC set to  0.000000
7/2/2010	1:35:57 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	1:35:57 PM	Tube furnace set to 1000
7/2/2010	1:37:18 PM	Helium valve closed
7/2/2010	1:37:18 PM	BCl3 valve closed
7/2/2010	1:37:18 PM	PH3 valve closed
7/2/2010	1:37:18 PM	SiCl4 pre valve closed
7/2/2010	1:37:18 PM	SiCl4 post valve closed
7/2/2010	1:37:18 PM	Main Vac valve closed
7/2/2010	1:37:18 PM	Bypass valve closed
7/2/2010	1:37:18 PM	H2 valve opened
7/2/2010	1:37:18 PM	Bubbler valve opened
7/2/2010	1:37:18 PM	Helium MFC set to  0.000000
7/2/2010	1:37:18 PM	H2 MFC set to  500.000000
7/2/2010	1:37:18 PM	BCl3 MFC set to  0.000000
7/2/2010	1:37:18 PM	PHl3 MFC set to  0.000000
7/2/2010	1:37:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	1:37:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	1:37:18 PM	Tube furnace set to 1000
7/2/2010	1:57:18 PM	Helium valve closed
7/2/2010	1:57:18 PM	PH3 valve closed
7/2/2010	1:57:18 PM	Main Vac valve closed
7/2/2010	1:57:18 PM	Bypass valve closed
7/2/2010	1:57:18 PM	H2 valve opened
7/2/2010	1:57:18 PM	BCl3 valve opened
7/2/2010	1:57:18 PM	SiCl4 pre valve opened
7/2/2010	1:57:18 PM	SiCl4 post valve opened
7/2/2010	1:57:18 PM	Bubbler valve opened
7/2/2010	1:57:18 PM	Helium MFC set to  0.000000
7/2/2010	1:57:18 PM	H2 MFC set to  500.000000
7/2/2010	1:57:18 PM	BCl3 MFC set to  35.000000
7/2/2010	1:57:18 PM	PHl3 MFC set to  0.000000
7/2/2010	1:57:18 PM	SiCl4 MFC set to  50.000000
7/2/2010	1:57:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	1:57:18 PM	Tube furnace set to 1000
7/2/2010	2:00:18 PM	Helium valve closed
7/2/2010	2:00:18 PM	BCl3 valve closed
7/2/2010	2:00:18 PM	PH3 valve closed
7/2/2010	2:00:18 PM	SiCl4 pre valve closed
7/2/2010	2:00:18 PM	SiCl4 post valve closed
7/2/2010	2:00:18 PM	Main Vac valve closed
7/2/2010	2:00:18 PM	Bypass valve closed
7/2/2010	2:00:18 PM	H2 valve opened
7/2/2010	2:00:18 PM	Bubbler valve opened
7/2/2010	2:00:18 PM	Helium MFC set to  0.000000
7/2/2010	2:00:18 PM	H2 MFC set to  500.000000
7/2/2010	2:00:18 PM	BCl3 MFC set to  0.000000
7/2/2010	2:00:18 PM	PHl3 MFC set to  0.000000
7/2/2010	2:00:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	2:00:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	2:00:18 PM	Tube furnace set to 750
7/2/2010	2:20:18 PM	H2 valve closed
7/2/2010	2:20:18 PM	BCl3 valve closed
7/2/2010	2:20:18 PM	PH3 valve closed
7/2/2010	2:20:18 PM	SiCl4 pre valve closed
7/2/2010	2:20:18 PM	SiCl4 post valve closed
7/2/2010	2:20:18 PM	Main Vac valve closed
7/2/2010	2:20:18 PM	Bypass valve closed
7/2/2010	2:20:18 PM	Helium valve opened
7/2/2010	2:20:18 PM	Bubbler valve opened
7/2/2010	2:20:18 PM	Helium MFC set to  500.000000
7/2/2010	2:20:18 PM	H2 MFC set to  0.000000
7/2/2010	2:20:18 PM	BCl3 MFC set to  0.000000
7/2/2010	2:20:18 PM	PHl3 MFC set to  0.000000
7/2/2010	2:20:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	2:20:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	2:20:18 PM	Tube furnace set to 0
7/2/2010	2:40:18 PM	Helium valve closed
7/2/2010	2:40:18 PM	H2 valve closed
7/2/2010	2:40:18 PM	BCl3 valve closed
7/2/2010	2:40:18 PM	PH3 valve closed
7/2/2010	2:40:18 PM	SiCl4 pre valve closed
7/2/2010	2:40:18 PM	SiCl4 post valve closed
7/2/2010	2:40:18 PM	Main Vac valve closed
7/2/2010	2:40:18 PM	Bypass valve closed
7/2/2010	2:40:18 PM	Bubbler valve closed
7/2/2010	2:40:18 PM	Helium MFC set to  0.000000
7/2/2010	2:40:18 PM	H2 MFC set to  0.000000
7/2/2010	2:40:18 PM	BCl3 MFC set to  0.000000
7/2/2010	2:40:18 PM	PHl3 MFC set to  0.000000
7/2/2010	2:40:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	2:40:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	2:40:18 PM	Tube furnace set to 0
7/2/2010	2:40:19 PM	Run finished at 2:40 PM
7/2/2010	3:32:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	3:32:45 PM	Recipe started at 3:32 PM
7/2/2010	3:32:45 PM	Helium valve closed
7/2/2010	3:32:45 PM	H2 valve closed
7/2/2010	3:32:45 PM	BCl3 valve closed
7/2/2010	3:32:45 PM	PH3 valve closed
7/2/2010	3:32:45 PM	SiCl4 pre valve closed
7/2/2010	3:32:45 PM	SiCl4 post valve closed
7/2/2010	3:32:45 PM	Main Vac valve closed
7/2/2010	3:32:45 PM	Bubbler valve closed
7/2/2010	3:32:45 PM	Bypass valve opened
7/2/2010	3:32:45 PM	Helium MFC set to  0.000000
7/2/2010	3:32:45 PM	H2 MFC set to  0.000000
7/2/2010	3:32:45 PM	BCl3 MFC set to  0.000000
7/2/2010	3:32:45 PM	PHl3 MFC set to  0.000000
7/2/2010	3:32:45 PM	SiCl4 MFC set to  0.000000
7/2/2010	3:32:45 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	3:32:45 PM	Tube furnace set to 0
7/2/2010	3:33:34 PM	Helium valve closed
7/2/2010	3:33:34 PM	H2 valve closed
7/2/2010	3:33:34 PM	BCl3 valve closed
7/2/2010	3:33:34 PM	PH3 valve closed
7/2/2010	3:33:34 PM	SiCl4 pre valve closed
7/2/2010	3:33:34 PM	SiCl4 post valve closed
7/2/2010	3:33:34 PM	Bubbler valve closed
7/2/2010	3:33:34 PM	Main Vac valve opened
7/2/2010	3:33:34 PM	Bypass valve opened
7/2/2010	3:33:34 PM	Helium MFC set to  0.000000
7/2/2010	3:33:34 PM	H2 MFC set to  0.000000
7/2/2010	3:33:34 PM	BCl3 MFC set to  0.000000
7/2/2010	3:33:34 PM	PHl3 MFC set to  0.000000
7/2/2010	3:33:34 PM	SiCl4 MFC set to  0.000000
7/2/2010	3:33:34 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	3:33:34 PM	Tube furnace set to 0
7/2/2010	3:33:34 PM	Run finished at 3:33 PM
7/2/2010	3:33:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	4:35:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2010	4:35:36 PM	Recipe started at 4:35 PM
7/2/2010	4:35:36 PM	H2 valve closed
7/2/2010	4:35:36 PM	BCl3 valve closed
7/2/2010	4:35:36 PM	PH3 valve closed
7/2/2010	4:35:36 PM	SiCl4 pre valve closed
7/2/2010	4:35:36 PM	SiCl4 post valve closed
7/2/2010	4:35:36 PM	Main Vac valve closed
7/2/2010	4:35:36 PM	Bypass valve closed
7/2/2010	4:35:36 PM	Bubbler valve closed
7/2/2010	4:35:36 PM	Helium valve opened
7/2/2010	4:35:36 PM	Helium MFC set to  500.000000
7/2/2010	4:35:36 PM	H2 MFC set to  0.000000
7/2/2010	4:35:36 PM	BCl3 MFC set to  0.000000
7/2/2010	4:35:36 PM	PHl3 MFC set to  0.000000
7/2/2010	4:35:37 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:35:37 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:35:37 PM	Tube furnace set to 0
7/2/2010	4:36:57 PM	Helium valve closed
7/2/2010	4:36:57 PM	H2 valve closed
7/2/2010	4:36:57 PM	BCl3 valve closed
7/2/2010	4:36:57 PM	PH3 valve closed
7/2/2010	4:36:57 PM	SiCl4 pre valve closed
7/2/2010	4:36:57 PM	SiCl4 post valve closed
7/2/2010	4:36:57 PM	Main Vac valve closed
7/2/2010	4:36:57 PM	Bypass valve closed
7/2/2010	4:36:57 PM	Bubbler valve closed
7/2/2010	4:36:57 PM	Helium MFC set to  0.000000
7/2/2010	4:36:57 PM	H2 MFC set to  0.000000
7/2/2010	4:36:57 PM	BCl3 MFC set to  0.000000
7/2/2010	4:36:57 PM	PHl3 MFC set to  0.000000
7/2/2010	4:36:57 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:36:57 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:36:57 PM	Tube furnace set to 0
7/2/2010	4:36:58 PM	Run finished at 4:36 PM
7/2/2010	4:36:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2010	4:52:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	4:52:07 PM	Recipe started at 4:52 PM
7/2/2010	4:52:07 PM	Helium valve closed
7/2/2010	4:52:07 PM	H2 valve closed
7/2/2010	4:52:07 PM	BCl3 valve closed
7/2/2010	4:52:07 PM	PH3 valve closed
7/2/2010	4:52:07 PM	SiCl4 pre valve closed
7/2/2010	4:52:07 PM	SiCl4 post valve closed
7/2/2010	4:52:07 PM	Main Vac valve closed
7/2/2010	4:52:07 PM	Bubbler valve closed
7/2/2010	4:52:07 PM	Bypass valve opened
7/2/2010	4:52:07 PM	Helium MFC set to  0.000000
7/2/2010	4:52:07 PM	H2 MFC set to  0.000000
7/2/2010	4:52:07 PM	BCl3 MFC set to  0.000000
7/2/2010	4:52:07 PM	PHl3 MFC set to  0.000000
7/2/2010	4:52:07 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:52:07 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:52:07 PM	Tube furnace set to 0
7/2/2010	4:52:56 PM	Helium valve closed
7/2/2010	4:52:56 PM	H2 valve closed
7/2/2010	4:52:56 PM	BCl3 valve closed
7/2/2010	4:52:56 PM	PH3 valve closed
7/2/2010	4:52:56 PM	SiCl4 pre valve closed
7/2/2010	4:52:56 PM	SiCl4 post valve closed
7/2/2010	4:52:56 PM	Bubbler valve closed
7/2/2010	4:52:56 PM	Main Vac valve opened
7/2/2010	4:52:56 PM	Bypass valve opened
7/2/2010	4:52:56 PM	Helium MFC set to  0.000000
7/2/2010	4:52:56 PM	H2 MFC set to  0.000000
7/2/2010	4:52:56 PM	BCl3 MFC set to  0.000000
7/2/2010	4:52:56 PM	PHl3 MFC set to  0.000000
7/2/2010	4:52:56 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:52:56 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:52:56 PM	Tube furnace set to 0
7/2/2010	4:52:56 PM	Run finished at 4:52 PM
7/2/2010	4:52:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	4:53:50 PM	Recipe started at 4:53 PM
7/2/2010	4:53:50 PM	H2 valve closed
7/2/2010	4:53:50 PM	BCl3 valve closed
7/2/2010	4:53:50 PM	PH3 valve closed
7/2/2010	4:53:50 PM	SiCl4 pre valve closed
7/2/2010	4:53:50 PM	SiCl4 post valve closed
7/2/2010	4:53:50 PM	Main Vac valve closed
7/2/2010	4:53:50 PM	Bypass valve closed
7/2/2010	4:53:50 PM	Bubbler valve closed
7/2/2010	4:53:50 PM	Helium valve opened
7/2/2010	4:53:50 PM	Helium MFC set to  500.000000
7/2/2010	4:53:50 PM	H2 MFC set to  0.000000
7/2/2010	4:53:50 PM	BCl3 MFC set to  0.000000
7/2/2010	4:53:50 PM	PHl3 MFC set to  0.000000
7/2/2010	4:53:50 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:53:50 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:53:50 PM	Tube furnace set to 80
7/2/2010	4:54:33 PM	Helium valve closed
7/2/2010	4:54:33 PM	H2 valve closed
7/2/2010	4:54:33 PM	BCl3 valve closed
7/2/2010	4:54:33 PM	PH3 valve closed
7/2/2010	4:54:33 PM	SiCl4 pre valve closed
7/2/2010	4:54:33 PM	SiCl4 post valve closed
7/2/2010	4:54:33 PM	Main Vac valve closed
7/2/2010	4:54:33 PM	Bypass valve closed
7/2/2010	4:54:33 PM	Bubbler valve closed
7/2/2010	4:54:33 PM	Helium MFC set to  0.000000
7/2/2010	4:54:33 PM	H2 MFC set to  0.000000
7/2/2010	4:54:33 PM	BCl3 MFC set to  0.000000
7/2/2010	4:54:33 PM	PHl3 MFC set to  0.000000
7/2/2010	4:54:33 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:54:33 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:54:33 PM	Tube furnace set to 80
7/2/2010	4:54:48 PM	Helium valve closed
7/2/2010	4:54:48 PM	H2 valve closed
7/2/2010	4:54:48 PM	BCl3 valve closed
7/2/2010	4:54:48 PM	PH3 valve closed
7/2/2010	4:54:48 PM	SiCl4 pre valve closed
7/2/2010	4:54:48 PM	SiCl4 post valve closed
7/2/2010	4:54:48 PM	Main Vac valve closed
7/2/2010	4:54:48 PM	Bubbler valve closed
7/2/2010	4:54:48 PM	Bypass valve opened
7/2/2010	4:54:48 PM	Helium MFC set to  0.000000
7/2/2010	4:54:48 PM	H2 MFC set to  0.000000
7/2/2010	4:54:48 PM	BCl3 MFC set to  0.000000
7/2/2010	4:54:48 PM	PHl3 MFC set to  0.000000
7/2/2010	4:54:48 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:54:48 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:54:48 PM	Tube furnace set to 80
7/2/2010	4:55:18 PM	Helium valve closed
7/2/2010	4:55:18 PM	H2 valve closed
7/2/2010	4:55:18 PM	BCl3 valve closed
7/2/2010	4:55:18 PM	PH3 valve closed
7/2/2010	4:55:18 PM	SiCl4 pre valve closed
7/2/2010	4:55:18 PM	SiCl4 post valve closed
7/2/2010	4:55:18 PM	Bubbler valve closed
7/2/2010	4:55:18 PM	Main Vac valve opened
7/2/2010	4:55:18 PM	Bypass valve opened
7/2/2010	4:55:18 PM	Helium MFC set to  0.000000
7/2/2010	4:55:18 PM	H2 MFC set to  0.000000
7/2/2010	4:55:18 PM	BCl3 MFC set to  0.000000
7/2/2010	4:55:18 PM	PHl3 MFC set to  0.000000
7/2/2010	4:55:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:55:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:55:18 PM	Tube furnace set to 80
7/2/2010	4:58:18 PM	H2 valve closed
7/2/2010	4:58:18 PM	BCl3 valve closed
7/2/2010	4:58:18 PM	PH3 valve closed
7/2/2010	4:58:18 PM	SiCl4 pre valve closed
7/2/2010	4:58:18 PM	SiCl4 post valve closed
7/2/2010	4:58:18 PM	Main Vac valve closed
7/2/2010	4:58:18 PM	Bypass valve closed
7/2/2010	4:58:18 PM	Bubbler valve closed
7/2/2010	4:58:18 PM	Helium valve opened
7/2/2010	4:58:18 PM	Helium MFC set to  500.000000
7/2/2010	4:58:18 PM	H2 MFC set to  0.000000
7/2/2010	4:58:18 PM	BCl3 MFC set to  0.000000
7/2/2010	4:58:18 PM	PHl3 MFC set to  0.000000
7/2/2010	4:58:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:58:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:58:18 PM	Tube furnace set to 80
7/2/2010	4:59:01 PM	Helium valve closed
7/2/2010	4:59:01 PM	H2 valve closed
7/2/2010	4:59:01 PM	BCl3 valve closed
7/2/2010	4:59:01 PM	PH3 valve closed
7/2/2010	4:59:01 PM	SiCl4 pre valve closed
7/2/2010	4:59:01 PM	SiCl4 post valve closed
7/2/2010	4:59:01 PM	Main Vac valve closed
7/2/2010	4:59:01 PM	Bypass valve closed
7/2/2010	4:59:01 PM	Bubbler valve closed
7/2/2010	4:59:01 PM	Helium MFC set to  0.000000
7/2/2010	4:59:01 PM	H2 MFC set to  0.000000
7/2/2010	4:59:01 PM	BCl3 MFC set to  0.000000
7/2/2010	4:59:01 PM	PHl3 MFC set to  0.000000
7/2/2010	4:59:01 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:59:01 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:59:01 PM	Tube furnace set to 80
7/2/2010	4:59:16 PM	Helium valve closed
7/2/2010	4:59:16 PM	H2 valve closed
7/2/2010	4:59:16 PM	BCl3 valve closed
7/2/2010	4:59:16 PM	PH3 valve closed
7/2/2010	4:59:16 PM	SiCl4 pre valve closed
7/2/2010	4:59:16 PM	SiCl4 post valve closed
7/2/2010	4:59:16 PM	Main Vac valve closed
7/2/2010	4:59:16 PM	Bubbler valve closed
7/2/2010	4:59:16 PM	Bypass valve opened
7/2/2010	4:59:16 PM	Helium MFC set to  0.000000
7/2/2010	4:59:16 PM	H2 MFC set to  0.000000
7/2/2010	4:59:16 PM	BCl3 MFC set to  0.000000
7/2/2010	4:59:16 PM	PHl3 MFC set to  0.000000
7/2/2010	4:59:16 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:59:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:59:16 PM	Tube furnace set to 80
7/2/2010	4:59:44 PM	Helium valve closed
7/2/2010	4:59:44 PM	H2 valve closed
7/2/2010	4:59:44 PM	BCl3 valve closed
7/2/2010	4:59:44 PM	PH3 valve closed
7/2/2010	4:59:44 PM	SiCl4 pre valve closed
7/2/2010	4:59:44 PM	SiCl4 post valve closed
7/2/2010	4:59:44 PM	Bubbler valve closed
7/2/2010	4:59:44 PM	Main Vac valve opened
7/2/2010	4:59:44 PM	Bypass valve opened
7/2/2010	4:59:44 PM	Helium MFC set to  0.000000
7/2/2010	4:59:44 PM	H2 MFC set to  0.000000
7/2/2010	4:59:44 PM	BCl3 MFC set to  0.000000
7/2/2010	4:59:44 PM	PHl3 MFC set to  0.000000
7/2/2010	4:59:44 PM	SiCl4 MFC set to  0.000000
7/2/2010	4:59:44 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	4:59:45 PM	Tube furnace set to 80
7/2/2010	5:02:45 PM	H2 valve closed
7/2/2010	5:02:45 PM	BCl3 valve closed
7/2/2010	5:02:45 PM	PH3 valve closed
7/2/2010	5:02:45 PM	SiCl4 pre valve closed
7/2/2010	5:02:45 PM	SiCl4 post valve closed
7/2/2010	5:02:45 PM	Main Vac valve closed
7/2/2010	5:02:45 PM	Bypass valve closed
7/2/2010	5:02:45 PM	Bubbler valve closed
7/2/2010	5:02:45 PM	Helium valve opened
7/2/2010	5:02:45 PM	Helium MFC set to  500.000000
7/2/2010	5:02:45 PM	H2 MFC set to  0.000000
7/2/2010	5:02:45 PM	BCl3 MFC set to  0.000000
7/2/2010	5:02:45 PM	PHl3 MFC set to  0.000000
7/2/2010	5:02:45 PM	SiCl4 MFC set to  0.000000
7/2/2010	5:02:45 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	5:02:45 PM	Tube furnace set to 80
7/2/2010	5:03:27 PM	Helium valve closed
7/2/2010	5:03:27 PM	H2 valve closed
7/2/2010	5:03:27 PM	BCl3 valve closed
7/2/2010	5:03:27 PM	PH3 valve closed
7/2/2010	5:03:27 PM	SiCl4 pre valve closed
7/2/2010	5:03:27 PM	SiCl4 post valve closed
7/2/2010	5:03:27 PM	Main Vac valve closed
7/2/2010	5:03:27 PM	Bypass valve closed
7/2/2010	5:03:27 PM	Bubbler valve closed
7/2/2010	5:03:27 PM	Helium MFC set to  0.000000
7/2/2010	5:03:27 PM	H2 MFC set to  0.000000
7/2/2010	5:03:27 PM	BCl3 MFC set to  0.000000
7/2/2010	5:03:27 PM	PHl3 MFC set to  0.000000
7/2/2010	5:03:27 PM	SiCl4 MFC set to  0.000000
7/2/2010	5:03:27 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	5:03:27 PM	Tube furnace set to 80
7/2/2010	5:03:42 PM	Helium valve closed
7/2/2010	5:03:42 PM	H2 valve closed
7/2/2010	5:03:42 PM	BCl3 valve closed
7/2/2010	5:03:42 PM	PH3 valve closed
7/2/2010	5:03:42 PM	SiCl4 pre valve closed
7/2/2010	5:03:42 PM	SiCl4 post valve closed
7/2/2010	5:03:42 PM	Main Vac valve closed
7/2/2010	5:03:42 PM	Bubbler valve closed
7/2/2010	5:03:42 PM	Bypass valve opened
7/2/2010	5:03:42 PM	Helium MFC set to  0.000000
7/2/2010	5:03:42 PM	H2 MFC set to  0.000000
7/2/2010	5:03:42 PM	BCl3 MFC set to  0.000000
7/2/2010	5:03:42 PM	PHl3 MFC set to  0.000000
7/2/2010	5:03:42 PM	SiCl4 MFC set to  0.000000
7/2/2010	5:03:42 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	5:03:42 PM	Tube furnace set to 80
7/2/2010	5:04:11 PM	Helium valve closed
7/2/2010	5:04:11 PM	H2 valve closed
7/2/2010	5:04:11 PM	BCl3 valve closed
7/2/2010	5:04:11 PM	PH3 valve closed
7/2/2010	5:04:11 PM	SiCl4 pre valve closed
7/2/2010	5:04:11 PM	SiCl4 post valve closed
7/2/2010	5:04:11 PM	Bubbler valve closed
7/2/2010	5:04:11 PM	Main Vac valve opened
7/2/2010	5:04:11 PM	Bypass valve opened
7/2/2010	5:04:11 PM	Helium MFC set to  0.000000
7/2/2010	5:04:11 PM	H2 MFC set to  0.000000
7/2/2010	5:04:11 PM	BCl3 MFC set to  0.000000
7/2/2010	5:04:11 PM	PHl3 MFC set to  0.000000
7/2/2010	5:04:11 PM	SiCl4 MFC set to  0.000000
7/2/2010	5:04:11 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	5:04:11 PM	Tube furnace set to 80
7/2/2010	5:07:11 PM	Helium valve closed
7/2/2010	5:07:11 PM	H2 valve closed
7/2/2010	5:07:11 PM	BCl3 valve closed
7/2/2010	5:07:11 PM	PH3 valve closed
7/2/2010	5:07:11 PM	SiCl4 pre valve closed
7/2/2010	5:07:11 PM	SiCl4 post valve closed
7/2/2010	5:07:11 PM	Bubbler valve closed
7/2/2010	5:07:11 PM	Main Vac valve opened
7/2/2010	5:07:11 PM	Bypass valve opened
7/2/2010	5:07:11 PM	Helium MFC set to  0.000000
7/2/2010	5:07:11 PM	H2 MFC set to  0.000000
7/2/2010	5:07:11 PM	BCl3 MFC set to  0.000000
7/2/2010	5:07:11 PM	PHl3 MFC set to  0.000000
7/2/2010	5:07:11 PM	SiCl4 MFC set to  0.000000
7/2/2010	5:07:11 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	5:07:11 PM	Tube furnace set to 0
7/2/2010	5:07:12 PM	Run finished at 5:07 PM
7/2/2010	6:26:40 PM	Main Vac valve closed
7/2/2010	6:26:42 PM	Bypass valve closed
7/2/2010	6:27:54 PM	Recipe started at 6:27 PM
7/2/2010	6:27:54 PM	Helium valve closed
7/2/2010	6:27:54 PM	BCl3 valve closed
7/2/2010	6:27:54 PM	PH3 valve closed
7/2/2010	6:27:54 PM	SiCl4 pre valve closed
7/2/2010	6:27:54 PM	SiCl4 post valve closed
7/2/2010	6:27:54 PM	Main Vac valve closed
7/2/2010	6:27:54 PM	Bypass valve closed
7/2/2010	6:27:54 PM	Bubbler valve closed
7/2/2010	6:27:54 PM	H2 valve opened
7/2/2010	6:27:54 PM	Helium MFC set to  0.000000
7/2/2010	6:27:54 PM	H2 MFC set to  500.000000
7/2/2010	6:27:54 PM	BCl3 MFC set to  0.000000
7/2/2010	6:27:54 PM	PHl3 MFC set to  0.000000
7/2/2010	6:27:54 PM	SiCl4 MFC set to  0.000000
7/2/2010	6:27:54 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	6:27:54 PM	Tube furnace set to 0
7/2/2010	6:29:15 PM	Helium valve closed
7/2/2010	6:29:15 PM	BCl3 valve closed
7/2/2010	6:29:15 PM	PH3 valve closed
7/2/2010	6:29:15 PM	SiCl4 pre valve closed
7/2/2010	6:29:15 PM	SiCl4 post valve closed
7/2/2010	6:29:15 PM	Main Vac valve closed
7/2/2010	6:29:15 PM	Bypass valve closed
7/2/2010	6:29:15 PM	H2 valve opened
7/2/2010	6:29:15 PM	Bubbler valve opened
7/2/2010	6:29:15 PM	Helium MFC set to  0.000000
7/2/2010	6:29:15 PM	H2 MFC set to  500.000000
7/2/2010	6:29:15 PM	BCl3 MFC set to  0.000000
7/2/2010	6:29:15 PM	PHl3 MFC set to  0.000000
7/2/2010	6:29:15 PM	SiCl4 MFC set to  0.000000
7/2/2010	6:29:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	6:29:15 PM	Tube furnace set to 1000
7/2/2010	6:49:15 PM	Helium valve closed
7/2/2010	6:49:15 PM	BCl3 valve closed
7/2/2010	6:49:15 PM	Main Vac valve closed
7/2/2010	6:49:15 PM	Bypass valve closed
7/2/2010	6:49:15 PM	H2 valve opened
7/2/2010	6:49:15 PM	PH3 valve opened
7/2/2010	6:49:15 PM	SiCl4 pre valve opened
7/2/2010	6:49:15 PM	SiCl4 post valve opened
7/2/2010	6:49:15 PM	Bubbler valve opened
7/2/2010	6:49:15 PM	Helium MFC set to  0.000000
7/2/2010	6:49:15 PM	H2 MFC set to  500.000000
7/2/2010	6:49:15 PM	BCl3 MFC set to  0.000000
7/2/2010	6:49:15 PM	PHl3 MFC set to  1.000000
7/2/2010	6:49:15 PM	SiCl4 MFC set to  50.000000
7/2/2010	6:49:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	6:49:15 PM	Tube furnace set to 1000
7/2/2010	7:09:15 PM	H2 valve closed
7/2/2010	7:09:15 PM	BCl3 valve closed
7/2/2010	7:09:15 PM	PH3 valve closed
7/2/2010	7:09:15 PM	SiCl4 pre valve closed
7/2/2010	7:09:15 PM	SiCl4 post valve closed
7/2/2010	7:09:15 PM	Main Vac valve closed
7/2/2010	7:09:15 PM	Bypass valve closed
7/2/2010	7:09:15 PM	Helium valve opened
7/2/2010	7:09:15 PM	Bubbler valve opened
7/2/2010	7:09:15 PM	Helium MFC set to  500.000000
7/2/2010	7:09:15 PM	H2 MFC set to  0.000000
7/2/2010	7:09:15 PM	BCl3 MFC set to  0.000000
7/2/2010	7:09:15 PM	PHl3 MFC set to  0.000000
7/2/2010	7:09:15 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:09:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:09:15 PM	Tube furnace set to 0
7/2/2010	7:29:15 PM	Helium valve closed
7/2/2010	7:29:15 PM	H2 valve closed
7/2/2010	7:29:15 PM	BCl3 valve closed
7/2/2010	7:29:15 PM	PH3 valve closed
7/2/2010	7:29:15 PM	SiCl4 pre valve closed
7/2/2010	7:29:15 PM	SiCl4 post valve closed
7/2/2010	7:29:15 PM	Main Vac valve closed
7/2/2010	7:29:15 PM	Bypass valve closed
7/2/2010	7:29:15 PM	Bubbler valve closed
7/2/2010	7:29:15 PM	Helium MFC set to  0.000000
7/2/2010	7:29:15 PM	H2 MFC set to  0.000000
7/2/2010	7:29:15 PM	BCl3 MFC set to  0.000000
7/2/2010	7:29:15 PM	PHl3 MFC set to  0.000000
7/2/2010	7:29:15 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:29:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:29:15 PM	Tube furnace set to 0
7/2/2010	7:29:16 PM	Run finished at 7:29 PM
7/2/2010	7:37:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	7:37:29 PM	Recipe started at 7:37 PM
7/2/2010	7:37:29 PM	Helium valve closed
7/2/2010	7:37:29 PM	H2 valve closed
7/2/2010	7:37:29 PM	BCl3 valve closed
7/2/2010	7:37:29 PM	PH3 valve closed
7/2/2010	7:37:29 PM	SiCl4 pre valve closed
7/2/2010	7:37:29 PM	SiCl4 post valve closed
7/2/2010	7:37:29 PM	Main Vac valve closed
7/2/2010	7:37:29 PM	Bubbler valve closed
7/2/2010	7:37:29 PM	Bypass valve opened
7/2/2010	7:37:29 PM	Helium MFC set to  0.000000
7/2/2010	7:37:29 PM	H2 MFC set to  0.000000
7/2/2010	7:37:29 PM	BCl3 MFC set to  0.000000
7/2/2010	7:37:29 PM	PHl3 MFC set to  0.000000
7/2/2010	7:37:29 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:37:29 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:37:29 PM	Tube furnace set to 0
7/2/2010	7:38:18 PM	Helium valve closed
7/2/2010	7:38:18 PM	H2 valve closed
7/2/2010	7:38:18 PM	BCl3 valve closed
7/2/2010	7:38:18 PM	PH3 valve closed
7/2/2010	7:38:18 PM	SiCl4 pre valve closed
7/2/2010	7:38:18 PM	SiCl4 post valve closed
7/2/2010	7:38:18 PM	Bubbler valve closed
7/2/2010	7:38:18 PM	Main Vac valve opened
7/2/2010	7:38:18 PM	Bypass valve opened
7/2/2010	7:38:18 PM	Helium MFC set to  0.000000
7/2/2010	7:38:18 PM	H2 MFC set to  0.000000
7/2/2010	7:38:18 PM	BCl3 MFC set to  0.000000
7/2/2010	7:38:18 PM	PHl3 MFC set to  0.000000
7/2/2010	7:38:18 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:38:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:38:18 PM	Tube furnace set to 0
7/2/2010	7:38:18 PM	Run finished at 7:38 PM
7/2/2010	7:38:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	7:44:12 PM	Recipe started at 7:44 PM
7/2/2010	7:44:12 PM	H2 valve closed
7/2/2010	7:44:12 PM	BCl3 valve closed
7/2/2010	7:44:12 PM	PH3 valve closed
7/2/2010	7:44:12 PM	SiCl4 pre valve closed
7/2/2010	7:44:12 PM	SiCl4 post valve closed
7/2/2010	7:44:12 PM	Main Vac valve closed
7/2/2010	7:44:12 PM	Bypass valve closed
7/2/2010	7:44:12 PM	Bubbler valve closed
7/2/2010	7:44:12 PM	Helium valve opened
7/2/2010	7:44:12 PM	Helium MFC set to  500.000000
7/2/2010	7:44:12 PM	H2 MFC set to  0.000000
7/2/2010	7:44:12 PM	BCl3 MFC set to  0.000000
7/2/2010	7:44:12 PM	PHl3 MFC set to  0.000000
7/2/2010	7:44:12 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:44:12 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:44:12 PM	Tube furnace set to 80
7/2/2010	7:44:54 PM	Helium valve closed
7/2/2010	7:44:54 PM	H2 valve closed
7/2/2010	7:44:54 PM	BCl3 valve closed
7/2/2010	7:44:54 PM	PH3 valve closed
7/2/2010	7:44:54 PM	SiCl4 pre valve closed
7/2/2010	7:44:54 PM	SiCl4 post valve closed
7/2/2010	7:44:54 PM	Main Vac valve closed
7/2/2010	7:44:54 PM	Bypass valve closed
7/2/2010	7:44:54 PM	Bubbler valve closed
7/2/2010	7:44:54 PM	Helium MFC set to  0.000000
7/2/2010	7:44:54 PM	H2 MFC set to  0.000000
7/2/2010	7:44:54 PM	BCl3 MFC set to  0.000000
7/2/2010	7:44:54 PM	PHl3 MFC set to  0.000000
7/2/2010	7:44:54 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:44:54 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:44:54 PM	Tube furnace set to 80
7/2/2010	7:45:09 PM	Helium valve closed
7/2/2010	7:45:09 PM	H2 valve closed
7/2/2010	7:45:09 PM	BCl3 valve closed
7/2/2010	7:45:09 PM	PH3 valve closed
7/2/2010	7:45:09 PM	SiCl4 pre valve closed
7/2/2010	7:45:09 PM	SiCl4 post valve closed
7/2/2010	7:45:09 PM	Main Vac valve closed
7/2/2010	7:45:09 PM	Bubbler valve closed
7/2/2010	7:45:09 PM	Bypass valve opened
7/2/2010	7:45:09 PM	Helium MFC set to  0.000000
7/2/2010	7:45:09 PM	H2 MFC set to  0.000000
7/2/2010	7:45:09 PM	BCl3 MFC set to  0.000000
7/2/2010	7:45:09 PM	PHl3 MFC set to  0.000000
7/2/2010	7:45:09 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:45:09 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:45:09 PM	Tube furnace set to 80
7/2/2010	7:45:37 PM	Helium valve closed
7/2/2010	7:45:37 PM	H2 valve closed
7/2/2010	7:45:37 PM	BCl3 valve closed
7/2/2010	7:45:37 PM	PH3 valve closed
7/2/2010	7:45:37 PM	SiCl4 pre valve closed
7/2/2010	7:45:37 PM	SiCl4 post valve closed
7/2/2010	7:45:37 PM	Bubbler valve closed
7/2/2010	7:45:37 PM	Main Vac valve opened
7/2/2010	7:45:37 PM	Bypass valve opened
7/2/2010	7:45:37 PM	Helium MFC set to  0.000000
7/2/2010	7:45:37 PM	H2 MFC set to  0.000000
7/2/2010	7:45:37 PM	BCl3 MFC set to  0.000000
7/2/2010	7:45:37 PM	PHl3 MFC set to  0.000000
7/2/2010	7:45:37 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:45:37 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:45:37 PM	Tube furnace set to 80
7/2/2010	7:48:37 PM	H2 valve closed
7/2/2010	7:48:37 PM	BCl3 valve closed
7/2/2010	7:48:37 PM	PH3 valve closed
7/2/2010	7:48:37 PM	SiCl4 pre valve closed
7/2/2010	7:48:37 PM	SiCl4 post valve closed
7/2/2010	7:48:37 PM	Main Vac valve closed
7/2/2010	7:48:37 PM	Bypass valve closed
7/2/2010	7:48:37 PM	Bubbler valve closed
7/2/2010	7:48:37 PM	Helium valve opened
7/2/2010	7:48:37 PM	Helium MFC set to  500.000000
7/2/2010	7:48:37 PM	H2 MFC set to  0.000000
7/2/2010	7:48:37 PM	BCl3 MFC set to  0.000000
7/2/2010	7:48:37 PM	PHl3 MFC set to  0.000000
7/2/2010	7:48:37 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:48:37 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:48:38 PM	Tube furnace set to 80
7/2/2010	7:49:19 PM	Helium valve closed
7/2/2010	7:49:19 PM	H2 valve closed
7/2/2010	7:49:19 PM	BCl3 valve closed
7/2/2010	7:49:19 PM	PH3 valve closed
7/2/2010	7:49:19 PM	SiCl4 pre valve closed
7/2/2010	7:49:19 PM	SiCl4 post valve closed
7/2/2010	7:49:19 PM	Main Vac valve closed
7/2/2010	7:49:19 PM	Bypass valve closed
7/2/2010	7:49:19 PM	Bubbler valve closed
7/2/2010	7:49:19 PM	Helium MFC set to  0.000000
7/2/2010	7:49:19 PM	H2 MFC set to  0.000000
7/2/2010	7:49:19 PM	BCl3 MFC set to  0.000000
7/2/2010	7:49:19 PM	PHl3 MFC set to  0.000000
7/2/2010	7:49:19 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:49:19 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:49:19 PM	Tube furnace set to 80
7/2/2010	7:49:34 PM	Helium valve closed
7/2/2010	7:49:34 PM	H2 valve closed
7/2/2010	7:49:34 PM	BCl3 valve closed
7/2/2010	7:49:34 PM	PH3 valve closed
7/2/2010	7:49:34 PM	SiCl4 pre valve closed
7/2/2010	7:49:34 PM	SiCl4 post valve closed
7/2/2010	7:49:34 PM	Main Vac valve closed
7/2/2010	7:49:34 PM	Bubbler valve closed
7/2/2010	7:49:34 PM	Bypass valve opened
7/2/2010	7:49:34 PM	Helium MFC set to  0.000000
7/2/2010	7:49:34 PM	H2 MFC set to  0.000000
7/2/2010	7:49:34 PM	BCl3 MFC set to  0.000000
7/2/2010	7:49:34 PM	PHl3 MFC set to  0.000000
7/2/2010	7:49:34 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:49:34 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:49:34 PM	Tube furnace set to 80
7/2/2010	7:50:02 PM	Helium valve closed
7/2/2010	7:50:02 PM	H2 valve closed
7/2/2010	7:50:02 PM	BCl3 valve closed
7/2/2010	7:50:02 PM	PH3 valve closed
7/2/2010	7:50:02 PM	SiCl4 pre valve closed
7/2/2010	7:50:02 PM	SiCl4 post valve closed
7/2/2010	7:50:02 PM	Bubbler valve closed
7/2/2010	7:50:02 PM	Main Vac valve opened
7/2/2010	7:50:02 PM	Bypass valve opened
7/2/2010	7:50:02 PM	Helium MFC set to  0.000000
7/2/2010	7:50:02 PM	H2 MFC set to  0.000000
7/2/2010	7:50:02 PM	BCl3 MFC set to  0.000000
7/2/2010	7:50:02 PM	PHl3 MFC set to  0.000000
7/2/2010	7:50:02 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:50:02 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:50:02 PM	Tube furnace set to 80
7/2/2010	7:53:02 PM	H2 valve closed
7/2/2010	7:53:02 PM	BCl3 valve closed
7/2/2010	7:53:02 PM	PH3 valve closed
7/2/2010	7:53:02 PM	SiCl4 pre valve closed
7/2/2010	7:53:02 PM	SiCl4 post valve closed
7/2/2010	7:53:02 PM	Main Vac valve closed
7/2/2010	7:53:02 PM	Bypass valve closed
7/2/2010	7:53:02 PM	Bubbler valve closed
7/2/2010	7:53:02 PM	Helium valve opened
7/2/2010	7:53:02 PM	Helium MFC set to  500.000000
7/2/2010	7:53:02 PM	H2 MFC set to  0.000000
7/2/2010	7:53:02 PM	BCl3 MFC set to  0.000000
7/2/2010	7:53:02 PM	PHl3 MFC set to  0.000000
7/2/2010	7:53:02 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:53:02 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:53:02 PM	Tube furnace set to 80
7/2/2010	7:53:44 PM	Helium valve closed
7/2/2010	7:53:44 PM	H2 valve closed
7/2/2010	7:53:44 PM	BCl3 valve closed
7/2/2010	7:53:44 PM	PH3 valve closed
7/2/2010	7:53:44 PM	SiCl4 pre valve closed
7/2/2010	7:53:44 PM	SiCl4 post valve closed
7/2/2010	7:53:44 PM	Main Vac valve closed
7/2/2010	7:53:44 PM	Bypass valve closed
7/2/2010	7:53:44 PM	Bubbler valve closed
7/2/2010	7:53:44 PM	Helium MFC set to  0.000000
7/2/2010	7:53:44 PM	H2 MFC set to  0.000000
7/2/2010	7:53:44 PM	BCl3 MFC set to  0.000000
7/2/2010	7:53:44 PM	PHl3 MFC set to  0.000000
7/2/2010	7:53:44 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:53:44 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:53:44 PM	Tube furnace set to 80
7/2/2010	7:53:59 PM	Helium valve closed
7/2/2010	7:53:59 PM	H2 valve closed
7/2/2010	7:53:59 PM	BCl3 valve closed
7/2/2010	7:53:59 PM	PH3 valve closed
7/2/2010	7:53:59 PM	SiCl4 pre valve closed
7/2/2010	7:53:59 PM	SiCl4 post valve closed
7/2/2010	7:53:59 PM	Main Vac valve closed
7/2/2010	7:53:59 PM	Bubbler valve closed
7/2/2010	7:53:59 PM	Bypass valve opened
7/2/2010	7:53:59 PM	Helium MFC set to  0.000000
7/2/2010	7:53:59 PM	H2 MFC set to  0.000000
7/2/2010	7:53:59 PM	BCl3 MFC set to  0.000000
7/2/2010	7:53:59 PM	PHl3 MFC set to  0.000000
7/2/2010	7:53:59 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:53:59 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:53:59 PM	Tube furnace set to 80
7/2/2010	7:54:26 PM	Helium valve closed
7/2/2010	7:54:26 PM	H2 valve closed
7/2/2010	7:54:26 PM	BCl3 valve closed
7/2/2010	7:54:26 PM	PH3 valve closed
7/2/2010	7:54:26 PM	SiCl4 pre valve closed
7/2/2010	7:54:26 PM	SiCl4 post valve closed
7/2/2010	7:54:26 PM	Bubbler valve closed
7/2/2010	7:54:26 PM	Main Vac valve opened
7/2/2010	7:54:26 PM	Bypass valve opened
7/2/2010	7:54:26 PM	Helium MFC set to  0.000000
7/2/2010	7:54:26 PM	H2 MFC set to  0.000000
7/2/2010	7:54:26 PM	BCl3 MFC set to  0.000000
7/2/2010	7:54:26 PM	PHl3 MFC set to  0.000000
7/2/2010	7:54:26 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:54:26 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:54:27 PM	Tube furnace set to 80
7/2/2010	7:57:27 PM	Helium valve closed
7/2/2010	7:57:27 PM	H2 valve closed
7/2/2010	7:57:27 PM	BCl3 valve closed
7/2/2010	7:57:27 PM	PH3 valve closed
7/2/2010	7:57:27 PM	SiCl4 pre valve closed
7/2/2010	7:57:27 PM	SiCl4 post valve closed
7/2/2010	7:57:27 PM	Bubbler valve closed
7/2/2010	7:57:27 PM	Main Vac valve opened
7/2/2010	7:57:27 PM	Bypass valve opened
7/2/2010	7:57:27 PM	Helium MFC set to  0.000000
7/2/2010	7:57:27 PM	H2 MFC set to  0.000000
7/2/2010	7:57:27 PM	BCl3 MFC set to  0.000000
7/2/2010	7:57:27 PM	PHl3 MFC set to  0.000000
7/2/2010	7:57:27 PM	SiCl4 MFC set to  0.000000
7/2/2010	7:57:27 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	7:57:27 PM	Tube furnace set to 0
7/2/2010	7:57:28 PM	Run finished at 7:57 PM
7/2/2010	9:15:35 PM	Bypass valve closed
7/2/2010	9:15:36 PM	Main Vac valve closed
7/2/2010	9:15:55 PM	Bypass valve opened
7/2/2010	9:15:56 PM	Main Vac valve opened
7/2/2010	9:16:34 PM	Recipe started at 9:16 PM
7/2/2010	9:16:34 PM	Helium valve closed
7/2/2010	9:16:34 PM	BCl3 valve closed
7/2/2010	9:16:34 PM	PH3 valve closed
7/2/2010	9:16:34 PM	SiCl4 pre valve closed
7/2/2010	9:16:34 PM	SiCl4 post valve closed
7/2/2010	9:16:34 PM	Main Vac valve closed
7/2/2010	9:16:34 PM	Bypass valve closed
7/2/2010	9:16:34 PM	Bubbler valve closed
7/2/2010	9:16:34 PM	H2 valve opened
7/2/2010	9:16:34 PM	Helium MFC set to  0.000000
7/2/2010	9:16:34 PM	H2 MFC set to  500.000000
7/2/2010	9:16:34 PM	BCl3 MFC set to  0.000000
7/2/2010	9:16:34 PM	PHl3 MFC set to  0.000000
7/2/2010	9:16:34 PM	SiCl4 MFC set to  0.000000
7/2/2010	9:16:34 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:16:34 PM	Tube furnace set to 0
7/2/2010	9:17:55 PM	Helium valve closed
7/2/2010	9:17:55 PM	BCl3 valve closed
7/2/2010	9:17:55 PM	PH3 valve closed
7/2/2010	9:17:55 PM	SiCl4 pre valve closed
7/2/2010	9:17:55 PM	SiCl4 post valve closed
7/2/2010	9:17:55 PM	Main Vac valve closed
7/2/2010	9:17:55 PM	Bypass valve closed
7/2/2010	9:17:55 PM	H2 valve opened
7/2/2010	9:17:55 PM	Bubbler valve opened
7/2/2010	9:17:55 PM	Helium MFC set to  0.000000
7/2/2010	9:17:55 PM	H2 MFC set to  500.000000
7/2/2010	9:17:55 PM	BCl3 MFC set to  0.000000
7/2/2010	9:17:55 PM	PHl3 MFC set to  0.000000
7/2/2010	9:17:55 PM	SiCl4 MFC set to  0.000000
7/2/2010	9:17:55 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:17:55 PM	Tube furnace set to 1000
7/2/2010	9:37:55 PM	Helium valve closed
7/2/2010	9:37:55 PM	BCl3 valve closed
7/2/2010	9:37:55 PM	Main Vac valve closed
7/2/2010	9:37:55 PM	Bypass valve closed
7/2/2010	9:37:55 PM	H2 valve opened
7/2/2010	9:37:55 PM	PH3 valve opened
7/2/2010	9:37:55 PM	SiCl4 pre valve opened
7/2/2010	9:37:55 PM	SiCl4 post valve opened
7/2/2010	9:37:55 PM	Bubbler valve opened
7/2/2010	9:37:55 PM	Helium MFC set to  0.000000
7/2/2010	9:37:55 PM	H2 MFC set to  500.000000
7/2/2010	9:37:55 PM	BCl3 MFC set to  0.000000
7/2/2010	9:37:55 PM	PHl3 MFC set to  1.000000
7/2/2010	9:37:55 PM	SiCl4 MFC set to  50.000000
7/2/2010	9:37:55 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:37:55 PM	Tube furnace set to 1000
7/2/2010	9:57:55 PM	H2 valve closed
7/2/2010	9:57:55 PM	BCl3 valve closed
7/2/2010	9:57:55 PM	PH3 valve closed
7/2/2010	9:57:55 PM	SiCl4 pre valve closed
7/2/2010	9:57:55 PM	SiCl4 post valve closed
7/2/2010	9:57:55 PM	Main Vac valve closed
7/2/2010	9:57:55 PM	Bypass valve closed
7/2/2010	9:57:55 PM	Helium valve opened
7/2/2010	9:57:55 PM	Bubbler valve opened
7/2/2010	9:57:55 PM	Helium MFC set to  500.000000
7/2/2010	9:57:55 PM	H2 MFC set to  0.000000
7/2/2010	9:57:55 PM	BCl3 MFC set to  0.000000
7/2/2010	9:57:55 PM	PHl3 MFC set to  0.000000
7/2/2010	9:57:55 PM	SiCl4 MFC set to  0.000000
7/2/2010	9:57:55 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	9:57:55 PM	Tube furnace set to 0
7/2/2010	10:17:55 PM	Helium valve closed
7/2/2010	10:17:55 PM	H2 valve closed
7/2/2010	10:17:55 PM	BCl3 valve closed
7/2/2010	10:17:55 PM	PH3 valve closed
7/2/2010	10:17:55 PM	SiCl4 pre valve closed
7/2/2010	10:17:55 PM	SiCl4 post valve closed
7/2/2010	10:17:55 PM	Main Vac valve closed
7/2/2010	10:17:55 PM	Bypass valve closed
7/2/2010	10:17:55 PM	Bubbler valve closed
7/2/2010	10:17:55 PM	Helium MFC set to  0.000000
7/2/2010	10:17:55 PM	H2 MFC set to  0.000000
7/2/2010	10:17:55 PM	BCl3 MFC set to  0.000000
7/2/2010	10:17:55 PM	PHl3 MFC set to  0.000000
7/2/2010	10:17:55 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:17:55 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:17:55 PM	Tube furnace set to 0
7/2/2010	10:17:55 PM	Run finished at 10:17 PM
7/2/2010	10:25:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	10:25:43 PM	Recipe started at 10:25 PM
7/2/2010	10:25:43 PM	Helium valve closed
7/2/2010	10:25:43 PM	H2 valve closed
7/2/2010	10:25:43 PM	BCl3 valve closed
7/2/2010	10:25:43 PM	PH3 valve closed
7/2/2010	10:25:43 PM	SiCl4 pre valve closed
7/2/2010	10:25:43 PM	SiCl4 post valve closed
7/2/2010	10:25:43 PM	Main Vac valve closed
7/2/2010	10:25:43 PM	Bubbler valve closed
7/2/2010	10:25:43 PM	Bypass valve opened
7/2/2010	10:25:43 PM	Helium MFC set to  0.000000
7/2/2010	10:25:43 PM	H2 MFC set to  0.000000
7/2/2010	10:25:43 PM	BCl3 MFC set to  0.000000
7/2/2010	10:25:43 PM	PHl3 MFC set to  0.000000
7/2/2010	10:25:43 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:25:43 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:25:43 PM	Tube furnace set to 0
7/2/2010	10:26:30 PM	Helium valve closed
7/2/2010	10:26:30 PM	H2 valve closed
7/2/2010	10:26:30 PM	BCl3 valve closed
7/2/2010	10:26:30 PM	PH3 valve closed
7/2/2010	10:26:30 PM	SiCl4 pre valve closed
7/2/2010	10:26:30 PM	SiCl4 post valve closed
7/2/2010	10:26:30 PM	Bubbler valve closed
7/2/2010	10:26:30 PM	Main Vac valve opened
7/2/2010	10:26:30 PM	Bypass valve opened
7/2/2010	10:26:30 PM	Helium MFC set to  0.000000
7/2/2010	10:26:30 PM	H2 MFC set to  0.000000
7/2/2010	10:26:30 PM	BCl3 MFC set to  0.000000
7/2/2010	10:26:30 PM	PHl3 MFC set to  0.000000
7/2/2010	10:26:30 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:26:30 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:26:31 PM	Tube furnace set to 0
7/2/2010	10:26:31 PM	Run finished at 10:26 PM
7/2/2010	10:26:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2010	10:26:59 PM	Recipe started at 10:26 PM
7/2/2010	10:26:59 PM	H2 valve closed
7/2/2010	10:26:59 PM	BCl3 valve closed
7/2/2010	10:26:59 PM	PH3 valve closed
7/2/2010	10:26:59 PM	SiCl4 pre valve closed
7/2/2010	10:26:59 PM	SiCl4 post valve closed
7/2/2010	10:26:59 PM	Main Vac valve closed
7/2/2010	10:26:59 PM	Bypass valve closed
7/2/2010	10:26:59 PM	Bubbler valve closed
7/2/2010	10:26:59 PM	Helium valve opened
7/2/2010	10:26:59 PM	Helium MFC set to  500.000000
7/2/2010	10:26:59 PM	H2 MFC set to  0.000000
7/2/2010	10:26:59 PM	BCl3 MFC set to  0.000000
7/2/2010	10:26:59 PM	PHl3 MFC set to  0.000000
7/2/2010	10:26:59 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:26:59 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:26:59 PM	Tube furnace set to 80
7/2/2010	10:27:40 PM	Helium valve closed
7/2/2010	10:27:40 PM	H2 valve closed
7/2/2010	10:27:40 PM	BCl3 valve closed
7/2/2010	10:27:40 PM	PH3 valve closed
7/2/2010	10:27:40 PM	SiCl4 pre valve closed
7/2/2010	10:27:40 PM	SiCl4 post valve closed
7/2/2010	10:27:40 PM	Main Vac valve closed
7/2/2010	10:27:40 PM	Bypass valve closed
7/2/2010	10:27:40 PM	Bubbler valve closed
7/2/2010	10:27:40 PM	Helium MFC set to  0.000000
7/2/2010	10:27:40 PM	H2 MFC set to  0.000000
7/2/2010	10:27:40 PM	BCl3 MFC set to  0.000000
7/2/2010	10:27:40 PM	PHl3 MFC set to  0.000000
7/2/2010	10:27:40 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:27:40 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:27:40 PM	Tube furnace set to 80
7/2/2010	10:27:55 PM	Helium valve closed
7/2/2010	10:27:55 PM	H2 valve closed
7/2/2010	10:27:55 PM	BCl3 valve closed
7/2/2010	10:27:55 PM	PH3 valve closed
7/2/2010	10:27:55 PM	SiCl4 pre valve closed
7/2/2010	10:27:55 PM	SiCl4 post valve closed
7/2/2010	10:27:55 PM	Main Vac valve closed
7/2/2010	10:27:55 PM	Bubbler valve closed
7/2/2010	10:27:56 PM	Bypass valve opened
7/2/2010	10:27:56 PM	Helium MFC set to  0.000000
7/2/2010	10:27:56 PM	H2 MFC set to  0.000000
7/2/2010	10:27:56 PM	BCl3 MFC set to  0.000000
7/2/2010	10:27:56 PM	PHl3 MFC set to  0.000000
7/2/2010	10:27:56 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:27:56 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:27:56 PM	Tube furnace set to 80
7/2/2010	10:28:24 PM	Helium valve closed
7/2/2010	10:28:24 PM	H2 valve closed
7/2/2010	10:28:24 PM	BCl3 valve closed
7/2/2010	10:28:24 PM	PH3 valve closed
7/2/2010	10:28:24 PM	SiCl4 pre valve closed
7/2/2010	10:28:24 PM	SiCl4 post valve closed
7/2/2010	10:28:24 PM	Bubbler valve closed
7/2/2010	10:28:24 PM	Main Vac valve opened
7/2/2010	10:28:24 PM	Bypass valve opened
7/2/2010	10:28:24 PM	Helium MFC set to  0.000000
7/2/2010	10:28:24 PM	H2 MFC set to  0.000000
7/2/2010	10:28:24 PM	BCl3 MFC set to  0.000000
7/2/2010	10:28:24 PM	PHl3 MFC set to  0.000000
7/2/2010	10:28:24 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:28:24 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:28:24 PM	Tube furnace set to 80
7/2/2010	10:31:24 PM	H2 valve closed
7/2/2010	10:31:24 PM	BCl3 valve closed
7/2/2010	10:31:24 PM	PH3 valve closed
7/2/2010	10:31:24 PM	SiCl4 pre valve closed
7/2/2010	10:31:24 PM	SiCl4 post valve closed
7/2/2010	10:31:24 PM	Main Vac valve closed
7/2/2010	10:31:24 PM	Bypass valve closed
7/2/2010	10:31:24 PM	Bubbler valve closed
7/2/2010	10:31:24 PM	Helium valve opened
7/2/2010	10:31:24 PM	Helium MFC set to  500.000000
7/2/2010	10:31:24 PM	H2 MFC set to  0.000000
7/2/2010	10:31:24 PM	BCl3 MFC set to  0.000000
7/2/2010	10:31:24 PM	PHl3 MFC set to  0.000000
7/2/2010	10:31:24 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:31:24 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:31:24 PM	Tube furnace set to 80
7/2/2010	10:32:05 PM	Helium valve closed
7/2/2010	10:32:05 PM	H2 valve closed
7/2/2010	10:32:05 PM	BCl3 valve closed
7/2/2010	10:32:05 PM	PH3 valve closed
7/2/2010	10:32:05 PM	SiCl4 pre valve closed
7/2/2010	10:32:05 PM	SiCl4 post valve closed
7/2/2010	10:32:05 PM	Main Vac valve closed
7/2/2010	10:32:05 PM	Bypass valve closed
7/2/2010	10:32:05 PM	Bubbler valve closed
7/2/2010	10:32:05 PM	Helium MFC set to  0.000000
7/2/2010	10:32:05 PM	H2 MFC set to  0.000000
7/2/2010	10:32:05 PM	BCl3 MFC set to  0.000000
7/2/2010	10:32:05 PM	PHl3 MFC set to  0.000000
7/2/2010	10:32:05 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:32:05 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:32:05 PM	Tube furnace set to 80
7/2/2010	10:32:20 PM	Helium valve closed
7/2/2010	10:32:20 PM	H2 valve closed
7/2/2010	10:32:20 PM	BCl3 valve closed
7/2/2010	10:32:20 PM	PH3 valve closed
7/2/2010	10:32:20 PM	SiCl4 pre valve closed
7/2/2010	10:32:20 PM	SiCl4 post valve closed
7/2/2010	10:32:20 PM	Main Vac valve closed
7/2/2010	10:32:20 PM	Bubbler valve closed
7/2/2010	10:32:20 PM	Bypass valve opened
7/2/2010	10:32:20 PM	Helium MFC set to  0.000000
7/2/2010	10:32:20 PM	H2 MFC set to  0.000000
7/2/2010	10:32:20 PM	BCl3 MFC set to  0.000000
7/2/2010	10:32:20 PM	PHl3 MFC set to  0.000000
7/2/2010	10:32:20 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:32:20 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:32:20 PM	Tube furnace set to 80
7/2/2010	10:32:48 PM	Helium valve closed
7/2/2010	10:32:48 PM	H2 valve closed
7/2/2010	10:32:48 PM	BCl3 valve closed
7/2/2010	10:32:48 PM	PH3 valve closed
7/2/2010	10:32:48 PM	SiCl4 pre valve closed
7/2/2010	10:32:48 PM	SiCl4 post valve closed
7/2/2010	10:32:48 PM	Bubbler valve closed
7/2/2010	10:32:48 PM	Main Vac valve opened
7/2/2010	10:32:48 PM	Bypass valve opened
7/2/2010	10:32:48 PM	Helium MFC set to  0.000000
7/2/2010	10:32:48 PM	H2 MFC set to  0.000000
7/2/2010	10:32:48 PM	BCl3 MFC set to  0.000000
7/2/2010	10:32:48 PM	PHl3 MFC set to  0.000000
7/2/2010	10:32:48 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:32:48 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:32:48 PM	Tube furnace set to 80
7/2/2010	10:35:48 PM	H2 valve closed
7/2/2010	10:35:48 PM	BCl3 valve closed
7/2/2010	10:35:48 PM	PH3 valve closed
7/2/2010	10:35:48 PM	SiCl4 pre valve closed
7/2/2010	10:35:48 PM	SiCl4 post valve closed
7/2/2010	10:35:48 PM	Main Vac valve closed
7/2/2010	10:35:48 PM	Bypass valve closed
7/2/2010	10:35:48 PM	Bubbler valve closed
7/2/2010	10:35:48 PM	Helium valve opened
7/2/2010	10:35:48 PM	Helium MFC set to  500.000000
7/2/2010	10:35:48 PM	H2 MFC set to  0.000000
7/2/2010	10:35:48 PM	BCl3 MFC set to  0.000000
7/2/2010	10:35:48 PM	PHl3 MFC set to  0.000000
7/2/2010	10:35:48 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:35:48 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:35:48 PM	Tube furnace set to 80
7/2/2010	10:36:29 PM	Helium valve closed
7/2/2010	10:36:29 PM	H2 valve closed
7/2/2010	10:36:29 PM	BCl3 valve closed
7/2/2010	10:36:29 PM	PH3 valve closed
7/2/2010	10:36:29 PM	SiCl4 pre valve closed
7/2/2010	10:36:29 PM	SiCl4 post valve closed
7/2/2010	10:36:29 PM	Main Vac valve closed
7/2/2010	10:36:29 PM	Bypass valve closed
7/2/2010	10:36:29 PM	Bubbler valve closed
7/2/2010	10:36:29 PM	Helium MFC set to  0.000000
7/2/2010	10:36:29 PM	H2 MFC set to  0.000000
7/2/2010	10:36:29 PM	BCl3 MFC set to  0.000000
7/2/2010	10:36:29 PM	PHl3 MFC set to  0.000000
7/2/2010	10:36:29 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:36:29 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:36:29 PM	Tube furnace set to 80
7/2/2010	10:36:44 PM	Helium valve closed
7/2/2010	10:36:44 PM	H2 valve closed
7/2/2010	10:36:44 PM	BCl3 valve closed
7/2/2010	10:36:44 PM	PH3 valve closed
7/2/2010	10:36:44 PM	SiCl4 pre valve closed
7/2/2010	10:36:44 PM	SiCl4 post valve closed
7/2/2010	10:36:44 PM	Main Vac valve closed
7/2/2010	10:36:44 PM	Bubbler valve closed
7/2/2010	10:36:44 PM	Bypass valve opened
7/2/2010	10:36:44 PM	Helium MFC set to  0.000000
7/2/2010	10:36:44 PM	H2 MFC set to  0.000000
7/2/2010	10:36:44 PM	BCl3 MFC set to  0.000000
7/2/2010	10:36:44 PM	PHl3 MFC set to  0.000000
7/2/2010	10:36:44 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:36:44 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:36:44 PM	Tube furnace set to 80
7/2/2010	10:37:11 PM	Helium valve closed
7/2/2010	10:37:11 PM	H2 valve closed
7/2/2010	10:37:11 PM	BCl3 valve closed
7/2/2010	10:37:11 PM	PH3 valve closed
7/2/2010	10:37:11 PM	SiCl4 pre valve closed
7/2/2010	10:37:11 PM	SiCl4 post valve closed
7/2/2010	10:37:11 PM	Bubbler valve closed
7/2/2010	10:37:11 PM	Main Vac valve opened
7/2/2010	10:37:11 PM	Bypass valve opened
7/2/2010	10:37:11 PM	Helium MFC set to  0.000000
7/2/2010	10:37:11 PM	H2 MFC set to  0.000000
7/2/2010	10:37:11 PM	BCl3 MFC set to  0.000000
7/2/2010	10:37:11 PM	PHl3 MFC set to  0.000000
7/2/2010	10:37:11 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:37:12 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:37:12 PM	Tube furnace set to 80
7/2/2010	10:40:12 PM	Helium valve closed
7/2/2010	10:40:12 PM	H2 valve closed
7/2/2010	10:40:12 PM	BCl3 valve closed
7/2/2010	10:40:12 PM	PH3 valve closed
7/2/2010	10:40:12 PM	SiCl4 pre valve closed
7/2/2010	10:40:12 PM	SiCl4 post valve closed
7/2/2010	10:40:12 PM	Bubbler valve closed
7/2/2010	10:40:12 PM	Main Vac valve opened
7/2/2010	10:40:12 PM	Bypass valve opened
7/2/2010	10:40:12 PM	Helium MFC set to  0.000000
7/2/2010	10:40:12 PM	H2 MFC set to  0.000000
7/2/2010	10:40:12 PM	BCl3 MFC set to  0.000000
7/2/2010	10:40:12 PM	PHl3 MFC set to  0.000000
7/2/2010	10:40:12 PM	SiCl4 MFC set to  0.000000
7/2/2010	10:40:12 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	10:40:12 PM	Tube furnace set to 0
7/2/2010	10:40:13 PM	Run finished at 10:40 PM
7/2/2010	11:33:32 PM	Bypass valve closed
7/2/2010	11:33:33 PM	Main Vac valve closed
7/2/2010	11:34:02 PM	Main Vac valve opened
7/2/2010	11:34:03 PM	Bypass valve opened
7/2/2010	11:36:15 PM	Recipe started at 11:36 PM
7/2/2010	11:36:15 PM	Helium valve closed
7/2/2010	11:36:15 PM	BCl3 valve closed
7/2/2010	11:36:15 PM	PH3 valve closed
7/2/2010	11:36:15 PM	SiCl4 pre valve closed
7/2/2010	11:36:15 PM	SiCl4 post valve closed
7/2/2010	11:36:15 PM	Main Vac valve closed
7/2/2010	11:36:15 PM	Bypass valve closed
7/2/2010	11:36:15 PM	Bubbler valve closed
7/2/2010	11:36:15 PM	H2 valve opened
7/2/2010	11:36:15 PM	Helium MFC set to  0.000000
7/2/2010	11:36:15 PM	H2 MFC set to  500.000000
7/2/2010	11:36:15 PM	BCl3 MFC set to  0.000000
7/2/2010	11:36:15 PM	PHl3 MFC set to  0.000000
7/2/2010	11:36:15 PM	SiCl4 MFC set to  0.000000
7/2/2010	11:36:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:36:15 PM	Tube furnace set to 0
7/2/2010	11:37:34 PM	Helium valve closed
7/2/2010	11:37:34 PM	BCl3 valve closed
7/2/2010	11:37:34 PM	PH3 valve closed
7/2/2010	11:37:34 PM	SiCl4 pre valve closed
7/2/2010	11:37:34 PM	SiCl4 post valve closed
7/2/2010	11:37:34 PM	Main Vac valve closed
7/2/2010	11:37:34 PM	Bypass valve closed
7/2/2010	11:37:34 PM	H2 valve opened
7/2/2010	11:37:34 PM	Bubbler valve opened
7/2/2010	11:37:34 PM	Helium MFC set to  0.000000
7/2/2010	11:37:34 PM	H2 MFC set to  500.000000
7/2/2010	11:37:34 PM	BCl3 MFC set to  0.000000
7/2/2010	11:37:34 PM	PHl3 MFC set to  0.000000
7/2/2010	11:37:34 PM	SiCl4 MFC set to  0.000000
7/2/2010	11:37:34 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:37:35 PM	Tube furnace set to 1000
7/2/2010	11:57:35 PM	Helium valve closed
7/2/2010	11:57:35 PM	BCl3 valve closed
7/2/2010	11:57:35 PM	Main Vac valve closed
7/2/2010	11:57:35 PM	Bypass valve closed
7/2/2010	11:57:35 PM	H2 valve opened
7/2/2010	11:57:35 PM	PH3 valve opened
7/2/2010	11:57:35 PM	SiCl4 pre valve opened
7/2/2010	11:57:35 PM	SiCl4 post valve opened
7/2/2010	11:57:35 PM	Bubbler valve opened
7/2/2010	11:57:35 PM	Helium MFC set to  0.000000
7/2/2010	11:57:35 PM	H2 MFC set to  500.000000
7/2/2010	11:57:35 PM	BCl3 MFC set to  0.000000
7/2/2010	11:57:35 PM	PHl3 MFC set to  1.000000
7/2/2010	11:57:35 PM	SiCl4 MFC set to  50.000000
7/2/2010	11:57:35 PM	Bypass solenoid MFC set to  0.000000
7/2/2010	11:57:35 PM	Tube furnace set to 1000
